HIGH VACUUM ENGINEERING
High-Vacuum Valve Product Range
Explore Miro all-in-one, manual, two-step, external, ultra-high-vacuum, vent and pressure-relief valves, plus custom manifolds for dilution refrigerators.
All-in-One Pneumatic High-Vacuum Poppet Valves
Miro all-in-one pneumatic high-vacuum poppet valves include MAC/MAO angle and MLC/MLO inline models in KF10–KF50 and ISO-K63/80/100 sizes, with dimensions and 3D models.
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Manual High-Vacuum Poppet Valves
Miro HAS angle and HLS inline manual high-vacuum poppet valves are available in KF16, KF25 and KF40 with formed SUS316L bellows, dimensions, specifications and 3D models.
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Two-Step High-Vacuum Poppet Valves
Miro DAC/DLC two-step high-vacuum poppet valves support closed, partially open and fully open states, with an adjustable 0.7–3.7 mm partial opening and control documentation.
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Pressure-Relief High-Vacuum Valve
Miro pressure-relief high-vacuum valves combine vacuum isolation and overpressure protection, opening at approximately 20 kPa differential pressure and closing automatically during pump-down.
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External Pneumatic High-Vacuum Angle Valves
Miro NAC/NAO/NAS external pneumatic high-vacuum angle valves support centralized valve-island control in KF16, KF25 and KF40, with specifications and 3D models.
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CF Ultra-High-Vacuum Angle Valves
Miro CF16/CF40 ultra-high-vacuum angle valves use a weld-free, one-piece SUS316L body and metal bellows, with internal and external leak rates below 1×10⁻¹² m³·Pa/s.
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Vent-Type High-Vacuum Valve
Miro vent-type high-vacuum valves use dual O-ring dynamic seals for chamber venting and moderate-vacuum applications in KF16, KF25, KF40 and KF50 sizes.
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Custom High-Vacuum Valve Manifolds
Miro custom high-vacuum valve manifolds for superconducting quantum-computer dilution refrigerators combine multi-valve integration, custom routing, clean assembly and individual helium leak testing.
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