HIGH VACUUM ENGINEERING
CF Ultra-High-Vacuum Angle Valves
Miro CF16/CF40 ultra-high-vacuum angle valves use a weld-free, one-piece SUS316L body and metal bellows, with internal and external leak rates below 1×10⁻¹² m³·Pa/s.
Ultra-High Vacuum angle valve
Size chart (unit: mm)
| model | A | B | C | D | E | F |
| CF40 | 65 | 65 | 159 | 97.5 | 62.8 | 62.8 |
| CF16 | 42 | 42 | 111 | 59 | 38 | 38 |
Parameters
| Model | CF40，CF16 |
| Body material | Stainless steel SUS316L(weld-free integral processing, mirror polished） |
| Dynamic seal | SUS316L metal corrugated bellow |
| External Leakage* | <1×10-12 m3•Pa/sec(1×10-11 mbar•L/sec ) |
| Internal Leakage* | <1×10-12 m3•Pa/sec(1×10-11 mbar•L/sec ) |
| Operating pressure | 1×10-9 mbar to 2000 mbar |
| Maximum forward operating pressure | 2000mbar |
| Maximum reverse operating pressure | 1200mbar |
| Sealing material | FKM |
| Air flow temperature | <250°C (with the valve body in a room temperature) |
*Note 1: The external leakage rate is defined as the rate at which external air permeates into the interior of the valve, mainly influenced by the quality of the sealing surface and the material of the O-rings. External leakage can be detected through external helium testing (poor quality sealing surfaces may rely on vacuum grease for temporary sealing, but vacuum grease will fail over time, leading to increased external leakage. Additionally, vacuum grease can also increase the internal leakage).
*Note 2: The internal leakage rate is influenced by the cleanliness inside the valve and the degassing performance of the internal materials. Oil and water stains can significantly increase the internal leakage rate (manifested as extremely high background levels in leak detectors). Dust, O-ring materials, and the internal surface quality of metal materials are also influencing factors, such as porous anodic oxide layers that can severely affect the internal leakage rate.