Miro all-in-one pneumatic high-vacuum poppet valve series

World-leading all-in-one pneumatic high-vacuum poppet valve

Highly Integrated Long Service Life Clean & Dust-Free Refined Aesthetics

Highly compact design with refined industrial aesthetics
Up to 10 million cycles for reliable operation under demanding conditions
Ultra-low solenoid power consumption (1.3 W) and convenient electrical wiring
Advanced two-wire Hall-effect switch with leakage current as low as 6 μA
Class 100,000 cleanroom assembly; 3-month returns and 1-year warranty

Other features: mirror-finish sealing surfaces; a built-in dust filter; excellent high-temperature capability; four signal indication modes; freely adjustable electrical connector orientation; and rigorous cleaning and helium leak testing controls.

Product Selection Downloads

All-in-one pneumatic high-vacuum poppet valve series

All-in-one Vacuum Valve (Patented)

● Valve features: The valve integrates components such as solenoid valves, magnetic switches, aviation plugs, dust filters, silencers and signal indicator lights, together with a built-in cylinder, into a highly compact all-in-one structure.

● Valve port size: ISOK100，ISOK80，ISOK63, KF50, KF40, KF25, KF16, KF10

● Body material: A6061, SUS316L (without welds)

● Optional models: normally open, normally closed, angle valve, inline valve

Parameters

High Vacuum Valve Manifold

● Features: Integrates dozens of high-vacuum valves into one module, reducing installation space and simplifying assembly and commissioning.

● Advantages: Strict cleaning process, rigorous vacuum sealing surface treatment, and strict leak testing

● Application: More than 200 manifolds have been delivered for dilution refrigerators used in superconducting quantum computers.

Details

Two-stage pneumatic high-vacuum poppet valve series

Two-step Vacuum Valve (Patented)

● Through PID control, the valve's poppet opening height is controlled with an accuracy of ±0.02 mm, allowing the valve to be closed, partially open or fully open. This provides two-step control and a soft-pump function.

● The electrical wiring is identical to that of traditional two-step valves with two solenoid valves.

● The poppet opening can be adjusted within a range of 0.7–3.7 mm.

● The external dimensions are the same as those of the all-in-one valve.

Parameters

Manual Vacuum Valve (Patented)

● Valve features: Turning the knob 90° opens or closes the valve, which locks automatically at each end position. The ergonomically designed knob provides comfortable operating torque.

● Valve port size: KF40, KF25, KF16, KF10

● Valve body material: A6061 aluminum (sandblasted and anodized exterior; precision-machined interior) or SUS316L stainless steel (one-piece, weld-free construction; internally and externally polished).

● Seal type: Ultra-long life 316L metal bellows

Parameters

Conventional Vacuum Valve

● A traditional type of valve, with the solenoid valve and magnetic switch located on the outside of the valve body. Customers need to equip the solenoid valve and magnetic switch themselves.

● Suitable for centralized control of valve islands.

● Ultra-long-life metal corrugated bellows.

Parameters

CF-flanged ultra-high-vacuum angle valve

Ultra-High Vacuum Valve

● CF flange, for ultra-high vacuum applications.

● The valve body is made of SUS316L stainless steel in a single processing step, with no welds. The inner and outer surfaces are polished, making the valve suitable for applications requiring extremely high vacuum levels and reliability.

● The internal and external leak rates are <1 × 10⁻¹² Pa·m³/s.

Parameters

Vent Vacuum Valve

● Features: No bellows; the dynamic vacuum seal uses dual O-rings

● Applications: Mainly used in environments with modest vacuum requirements, as well as for venting vacuum chambers

● Available configurations: KF16, KF25, KF40, KF50; Normally closed, normally open, double-acting

Parameters

Pressure-relief Vacuum Valve

● Combines vacuum valve and overpressure protection functions

● When the chamber pressure exceeds atmospheric pressure by 20 kPa, the valve poppet will fully open

● When the chamber is evacuated, the valve poppet will automatically close and seal, with a leak rate of <1 × 10⁻¹¹ Pa·m³/s.

Parameters

Rigorous Cleanliness Process

01
Stage 1 Cleaning

Ultrasonic cleaning + hydrocarbon cleaning agent
02
Stage 2 Cleaning

Ultrasonic cleaning + ultrapure water + alcohol
03
Stage 3 Cleaning

Ultrasonic cleaning + ultrapure water
04
Final Manual Wiping

Pure alcohol + manual wiping

Class 100,000 CleanroomParts receiving, cleaning, assembly, and packaging are all performed in the cleanroom.
Vacuum Packaging

Rigorous Quality Inspection Process

01
Initial Functional Inspection

Actuation, electrical performance, and cylinder sealing tests
02
10,000-Cycle Run-In

Confirms mature and reliable valve operation
03
Functional Reinspection

Repeat actuation, electrical performance, and cylinder sealing tests
04
Helium Leak Testing

Rigorous helium leak testing

Helium Leak-Rate Limits

High Vacuum: External ＜1 × 10⁻¹¹ Pa·m³/s · Internal ＜1 × 10⁻¹⁰ Pa·m³/s
Ultra-High Vacuum: External ＜1 × 10⁻¹² Pa·m³/s · Internal ＜1 × 10⁻¹² Pa·m³/s

World-leading all-in-one pneumatic high-vacuum poppet valve

Stage 1 Cleaning

Stage 2 Cleaning

Stage 3 Cleaning

Final Manual Wiping

Initial Functional Inspection

10,000-Cycle Run-In

Functional Reinspection

Helium Leak Testing