Miro all-in-one pneumatic high-vacuum poppet valve series

World-leading all-in-one pneumatic high-vacuum poppet valve

Highly Integrated Long Service Life Clean & Dust-Free Refined Aesthetics

Highly compact design with refined industrial aesthetics
Up to 10 million cycles for reliable operation under demanding conditions
Ultra-low solenoid power consumption (1.3 W) and convenient electrical wiring
Advanced two-wire Hall-effect switch with leakage current as low as 6 μA
Class 100,000 cleanroom assembly; 3-month returns and 1-year warranty

Other features: mirror-finish sealing surfaces; a built-in dust filter; excellent high-temperature capability; four signal indication modes; freely adjustable electrical connector orientation; and rigorous cleaning and helium leak testing controls.

Product Selection Downloads

All-in-one pneumatic high-vacuum poppet valve series

All-in-one Vacuum Valve (Patented)

● Valve features: The interior integrates components such as solenoid valves, magnetic switches, aviation plugs, dust filters, silencers, and signal indicator lights, along with a built-in cylinder structure, forming a highly compact All-in-one structure.

● Valve port size: ISOK100，ISOK80，ISOK63, KF50, KF40, KF25, KF16, KF10

● Body material: A6061, SUS316L (without welds)

● Optional models: normally open, normally closed, angle valve, inline valve

Parameters

High Vacuum Valve Manifold

● Feature: Integrates up to dozens of high vacuum valves into a single module, offering a space-saving design, fewer seals, and faster and easier assembly

● Advantages: Strict cleaning process, rigorous vacuum sealing surface treatment, and strict leak testing

● Application Case: 200+ units already applied in dilution refrigerators for superconducting quantum computers

Details

Two-stage pneumatic high-vacuum poppet valve series

Two-step Vacuum Valve (Patented)

● Through PID control, the valve's poppet opening height is controlled with an accuracy of ±0.02mm, allowing the valve to be in closed, partially open, or fully open states. This achieves the valve's two-step control function, as a soft pump feature.

● The electrical wiring is identical to that of traditional two-step valves with two solenoid valves.

● The height of the poppet can be adjusted with an range of 0.7~3.7mm.

● The appearance is the same with the All-in-one valve.

Parameters

Manual Vacuum Valve (Patented)

● Valve features: By rotating the knob 90°, the valve can be opened or closed; it automatically locks in place after switching; carefully designed for comfortable human torque.

● Valve port size: KF40, KF25, KF16, KF10

● Valve body material: Aluminum A6061 (external sandblasted oxidation, internal aluminum body precision machining), Stainless steel 316L (All-in-one processing without welds, internal and external polishing)

● Seal type: Ultra-long life 316L metal bellows

Parameters

External pneumatic high-vacuum angle valve

Conventional Vacuum Valve

● A traditional type of valve, with the solenoid valve and magnetic switch located on the outside of the valve body. Customers need to equip the solenoid valve and magnetic switch themselves.

● Suitable for centralized control of valve islands.

● Ultra-high life metal corrugated bellows.

Parameters

CF-flanged ultra-high-vacuum angle valve

Ultra-High Vacuum Valve

● CF flange, for ultra-high vacuum applications.

● The valve body is made of SUS316L stainless steel in a single processing step, with no welds. The inner and outer surfaces are polished, suitable for scenarios that require extremely high vacuum levels and reliability.

● The leakage rates for internal and external leaks are<1x10^-12Pa*m³/s。

Parameters

Vent Vacuum Valve

● Features: No bellows; vacuum dynamic sealing uses double O-rings

● Applications: Mainly used in environments with modest vacuum requirements, as well as for venting vacuum chambers

● Available configurations: KF16, KF25, KF40, KF50; Normally closed, normally open, double-acting

Parameters

Pressure-relief Vacuum Valve

● Combines vacuum valve and overpressure protection functions

● When the pressure on the chamber side exceeds the atmospheric side by 20KPa, the valve poppet will fully open

● When the chamber is vacuumed, the valve poppet will automatically close and seal, with a leakage rate of<1x10^-11Pa*m³/s。

Parameters

Rigorous Cleanliness Process

01
Stage 1 Cleaning

Ultrasonic cleaning + hydrocarbon cleaning agent
02
Stage 2 Cleaning

Ultrasonic cleaning + ultrapure water + alcohol
03
Stage 3 Cleaning

Ultrasonic cleaning + ultrapure water
04
Final Manual Wiping

Pure alcohol + manual wiping

Class 100,000 CleanroomParts receiving, cleaning, assembly, and packaging are all performed in the cleanroom.
Vacuum Packaging

Rigorous Quality Inspection Process

01
Initial Functional Inspection

Actuation, electrical performance, and cylinder sealing tests
02
10,000-Cycle Run-In

Confirms mature and reliable valve operation
03
Functional Reinspection

Repeat actuation, electrical performance, and cylinder sealing tests
04
Helium Leak Testing

Rigorous helium leak testing

Helium Leak-Rate Limits

High Vacuum: External ＜1×10⁻¹¹ m³·Pa/s · Internal ＜1×10⁻¹⁰ m³·Pa/s
Ultra-High Vacuum: External ＜1×10⁻¹² m³·Pa/s · Internal ＜1×10⁻¹² m³·Pa/s

World-leading all-in-one pneumatic high-vacuum poppet valve

Stage 1 Cleaning

Stage 2 Cleaning

Stage 3 Cleaning

Final Manual Wiping

Initial Functional Inspection

10,000-Cycle Run-In

Functional Reinspection

Helium Leak Testing