HIGH VACUUM ENGINEERING
Pressure-Relief High-Vacuum Valve
Miro pressure-relief high-vacuum valves combine vacuum isolation and overpressure protection, opening at approximately 20 kPa differential pressure and closing automatically during pump-down.
Pressure-relief vacuum valve
Note: For the external dimensions and 3D model, please refer to the all-in-one vacuum valve.
Product introduction
●Installation method: the lower flange is connected to the chamber, and the side flange is connected to the atmosphere.
●When the pressure (P) on the chamber side exceeds atmospheric pressure by 20 kPa, the valve poppet will fully open (the appropriate pressure can be designed according to customer requirements).
●When the pressure (P) on the chamber side exceeds atmospheric pressure by about 10 kPa, the valve begins to leak slightly.
●When the chamber is evacuated, the valve poppet automatically closes and seals.
●The external dimensions are the same as those of the MAC-series all-in-one vacuum valve.
Parameters
| Body material | A6061 aluminum or SUS316L stainless steel (one-piece, weld-free construction; mirror-polished surfaces). |
| Dynamic seal | FKM |
| External Leakage* | <1 × 10−12 Pa·m³/s (1 × 10−11 mbar·L/s) |
| Internal Leakage* | <1 × 10−11 mbar·L/s (1 × 10−10 Pa·m³/s) |
| Maximum reverse operating pressure | ≈ 10 kPa |
| Maximum process-gas temperature | < 250 °C (with the valve body maintained at room temperature) |
Note: Of the valve's two flange ports, connect the side flange to atmosphere and the lower flange to the vacuum chamber. When the chamber is evacuated, the valve poppet automatically closes and seals. When the chamber-side pressure exceeds atmospheric pressure by approximately 20 kPa, the valve poppet fully opens.