HIGH VACUUM ENGINEERING
Pressure-Relief High-Vacuum Valve
Miro pressure-relief high-vacuum valves combine vacuum isolation and overpressure protection, opening at approximately 20 kPa differential pressure and closing automatically during pump-down.
Pressure-relief vacuum valve
Note: For the appearance size and 3D model, please refer to the All-in-one vacuum valve
Product introduction
●Installation method: the lower flange is connected to the chamber, and the side flange is connected to the atmosphere.
●When the pressure (P) on the chamber side exceeds the atmospheric side (ATM) by 20KPa, the valve plate will fully open (the appropriate pressure can be designed according to customer requirements).
●When the pressure (P) on the chamber side exceeds the atmospheric side (ATM) by about 10KPa, the valve plate will start to have a slight leak.
●When the chamber side is vacuumed, the valve plate will automatically close and seal.
●The appearance size is the same as the MAC series All-in-one vacuum valve.
Parameters
| Body material | Aluminum A6061, Stainless steel SUS316L (weld-free integral processing, mirror polished） |
| Dynamic seal | FKM |
| External Leakage* | <1×10-12 m3•Pa/sec(1×10-11 mbar•L/sec ) |
| Internal Leakage* | <1×10-11 mbar•L/sec (1×10-10 m3•Pa/sec) |
| Maximum reverse operating pressure | ≈10KPa |
| Air flow temperature | <250°C (with the valve body in a room temperature) |
Note: Among the two flange ports of the Pressure-relief pneumatic high vacuum angle valve, the side flange port is connected to the atmospheric side, and the bottom flange should be connected to the vacuum side. When the chamber side is vacuumed, the valve plate will automatically close and seal. When the pressure (P) on the chamber side exceeds the atmospheric side (ATM) by about 20KPa, the valve plate fully opens.