HIGH VACUUM ENGINEERING
All-in-One Pneumatic High-Vacuum Poppet Valves
Miro all-in-one pneumatic high-vacuum poppet valves include MAC/MAO angle and MLC/MLO inline models in KF10–KF50 and ISO-K63/80/100 sizes, with dimensions and 3D models.
All-in-one angle valve (MAC, MAO)
Angle valve size chart (unit: mm)
| model | A | B | C | D | E | F | G | Z |
| KF50 | 78 | 78 | 189 | 109 | 70 | 70 | 32.2 | 10 |
| KF40 | 65 | 65 | 161.2 | 97.5 | 65 | 65 | 32.2 | 10 |
| KF25 | 52 | 52 | 136.5 | 78 | 50 | 50 | 32.2 | 8 |
| KF16 | 42 | 42 | 113 | 61 | 40 | 40 | 32.2 | 4 |
| KF10 | 42 | 42 | 107 | 61 | 30 | 40 | 32.2 | 4 |
Download angle valve 3D model:
KF10 KF16 KF25 KF40 KF50 ISO-K DN63 Aviation plug
All-in-one inline valve (MLC, MLO)
Inline valve size chart (unit: mm)
| model | A | B | C | D | E | G | Z |
| KF50 | 78 | 78 | 178 | 198 | 186 | 32.3 | 10 |
| KF40 | 65 | 65 | 130 | 162.5 | 148 | 32.2 | 10 |
| KF25 | 52 | 52 | 100 | 136 | 122 | 32.2 | 8 |
| KF16 | 42 | 42 | 80 | 114 | 104 | 32.2 | 4 |
| KF10 | 42 | 42 | 80 | 114 | 104 | 32.2 | 4 |
Parameters
| Model | ISOK100，ISOK80，ISOK63，KF50，KF40，KF25，KF16，KF10 |
| Body material | Aluminum A6061, Stainless steel SUS316L (weld-free integral processing, mirror polished） |
| Dynamic seal | SUS316L metal corrugated bellow |
| Driving gas | Clean compressed air or inert gas (filter precision grade ISO8573-15.4.4), 6mm inlet pipe |
| Driving gas pressure | 3.5-7 bar |
| Typical gas pressure | 6 bar |
| External Leakage* | <1×10-11 m3•Pa/sec(1×10-10 mbar•L/sec ) |
| Internal Leakage* | <1×10-10 m3•Pa/sec(1×10-9 mbar•L/sec ) |
| Operating pressure | 1×10-9 mbar to 2000 mbar |
| Maximum forward operating pressure | 2000mbar |
| Maximum reverse operating pressure | 1200mbar |
| Sealing material | FKM |
| Air flow temperature | <250°C (with the valve body in a room temperature) |
| Spanlife | KF40 valve ≈ 15 million cycles, KF25, KF16 valves ≈ 10 million cycles, KF50 valve > 6.5 million cycles |
| Solenoid voltage | 24V(±%5) |
| Magnetic switch parameters | Voltage 5~28V, leakage current 6μA, operating voltage drop about 2.5V, maximum operating current 0.5A (with short circuit protection function at 0.35A) |
| LED indication | Upper yellow LED on (valve open), lower yellow LED on (valve closed), red LED on (solenoid valve powered) |
| Mechanical rod indication | 10mm (customizable from 0~10mm) |
*Note 1: The external leakage rate is defined as the rate at which external air permeates into the interior of the valve, mainly influenced by the quality of the sealing surface and the material of the O-rings. External leakage can be detected through external helium testing (poor quality sealing surfaces may rely on vacuum grease for temporary sealing, but vacuum grease will fail over time, leading to increased external leakage. Additionally, vacuum grease can also increase the internal leakage).
*Note 2: The internal leakage rate is influenced by the cleanliness inside the valve and the degassing performance of the internal materials. Oil and water stains can significantly increase the internal leakage rate (manifested as extremely high background levels in leak detectors). Dust, O-ring materials, and the internal surface quality of metal materials are also influencing factors, such as porous anodic oxide layers that can severely affect the internal leakage rate.