Highly integrated
One module can integrate dozens of high-vacuum valves and simplify system architecture.
CUSTOM ENGINEERING
High Vacuum Valve Manifold
Core application | Dilution refrigerator systems for superconducting quantum computers
Compact Integrated Design
Reduced footprint
A highly compact manifold structure reduces equipment-space requirements.
Faster commissioning
Modular interfaces and centralized assembly reduce on-site installation and commissioning work.
Project-specific interfaces
Interface direction, size and quantity can be customized to the required flow path and layout.
- Highly integrated
- Reduced footprint
- Faster commissioning
- Project-specific interfaces
Rigorous cleaning and helium testing to meet exacting quality standards
Rigorous cleaning process
Four cleaning rounds use hydrocarbon detergent and deionized-water ultrasonic cleaning, with repeated reorientation to reach every bore; all holes and corners are then wiped manually with pure alcohol.
Clean assembly
High-pressure clean air is used to purge every bore, and all assembly and testing are carried out in a Class 100,000 cleanroom.
10,000-cycle pre-run
After assembly, the manifold undergoes 10,000 open-close cycles to verify mature, stable operation.
Individual helium leak testing
Every sealing surface is helium-leak-tested independently and confirmed by two inspectors to ensure reliable sealing.
Advanced applications
Application: Dilution refrigerator systems for superconducting quantum computers · 200+ manifolds delivered
Valve Core Models & Design Files.zip
The package includes KF16, KF25 and KF40 valve-body and valve-core models, plus valve-seat sealing-surface and manifold design-reference files.
Download ZIPBring your vacuum-process requirements to Miro
Provide your interface, conductance-routing and space-layout requirements, and we will support manifold engineering, assembly and leak testing.